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About Us
Company Profile
Corporate Culture
Development History
Patent Certificate
Qualification and Honor
Products
Semiconductor Applications/UV Components
DI Lithography/ Maskless Lithography
Parallel Light/Proximity (Contact) Lithography
Projection/Step-and-Scan Lithography
Telematics Applications
Virtual Display/Myopia Prevention
Airborne Imaging Without Any Medium
Other Optics
Technology
News
Join Us
Talent Culture
Brilliant BHOE
Recruitment Positions
Contact Us
Message
Contact
中文
English
Home
>
Products
>
Projection/Step-and-Scan Lithography
>
Large-Field Step-and-Repeat Projection Lithography
Large-Field Step-and-Repeat Projection Lithography
Large-Field Step-and-Repeat Projection Lithography
Large-Field Step-and-Repeat Projection Lithography
Large-Field Step-and-Repeat Projection Lithography
Specifications
Parameter
Specifications
Waves（λ）
405nm
Magnification
1X
Depth of Field(DOF)
±100um
Line Width Resolution
15um
Field
215x110mm
Light Output Efficiency
>70%
Non-uniformity
<4%
Size
805x460x1787mm（LxWxH）
Product Consultation
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